UCLA Nanofabrication Laboratory (UCLA NanoLab) (UCLA)
The UCLA Nanofabrication Laboratory (UCLA NanoLab) is a shared-use clean-room that provides state-of-the-art equipment, facilities, and technical expertise for fabricating the most demanding nano-scale structures and devices. The UCLA NanoLab was created to support all aspects of nanofabrication-related research and to advance research and learning in nano-science. Services include: (1) e-beam lithography, (2) optical lithography, (3) thin-film deposition, (4) dry etch, (5) thermal processing, (6) metrology, and (7) access to integrated bio-suites.
For more information, please visit the UCLA NanoLab website.
Last updated
January 24, 2024